Hole-mask colloidal nanolithography combined with tilted-angle-rotation evaporation: A versatile method for fabrication of low-cost and large-area complex plasmonic nanostructures and metamaterials

• Jun Zhao,
• Bettina Frank,
• Frank Neubrech,
• Chunjie Zhang,
• Paul V. Braun and
• Harald Giessen

Beilstein J. Nanotechnol. 2014, 5, 577–586, doi:10.3762/bjnano.5.68

• . Additionally, we give details on the control of the nanostructure lateral density which allows for the multilayer-fabrication of complex nanostructures. In two accompanying movies, the fabrication strategy is explained and details are being demonstrated in the lab. The movies can be found at the website of

• Beilstein TV. Keywords: hole-mask colloidal nanolithography; localized surface plasmon resonance sensing; low-cost large-area plasmonic nanostructures; multilayer fabrication; surface-enhanced infrared absorption spectroscopy (SERS); Introduction Optics with metallic nanostructures has generated keen

• -layer stacked gold disks, (g) disks and split-rings by multilayer fabrication, (h) 3D chiral gold spirals, (i) 3D chiral tetramers. All structures are fabricated with hole-masks, which are prepared by 119 nm diameter PS spheres and 230 nm PMMA, except samples (f) and (i), for which 220 nm diameter PS